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Nikon OST3000 / 12" Wafer Inspection

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产品名称:Nikon OST3000 / 12" Wafer Inspection

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Nikon OST3000 / 12" Wafer Inspection 

Simpie and speedy manual visual inspection of 300mm wafers. Contributes to dramatic increases in yields as an inline inspection system and analysis tool for backend process.

Overview
budget tool

Available for 8" and 12" wafer inspection

High resolution wafer surface and backside macro capture function

FOUP/FOSB handle

Large area and high brightness macro illuminator

available for Z axis measurement( bump height,particle height..)

safety design for wafer transfer and loadport system (SEMI S2)

5 million pixes digital CCD camera with measurement software

 


电   话: 010-62553066
010-62565779(总机)

传   真: 010-62566652

测量部:400-172-5117

测定部:400-820-5501